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App. No. 10/126,469 · Confirmation No. 1828

SINGLE DRIVE SYSTEM FOR A BI-DIRECTIONAL LINEAR CHEMICAL MECHANICAL POLISHING APPARATUS

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2008-12-15 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2008-12-01 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2003-07-17 A.NA Amendment after Notice of Allowance (Rule 312) 1 View
2003-07-17 CLM Claims 1 View
2003-07-17 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-07-10 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-07-10 CLM Claims 1 View
2003-07-10 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-07-10 LET. Miscellaneous Incoming Letter 1 View
2002-10-07 TRNA Transmittal of New Application 3 View
2002-10-07 A.PE Preliminary Amendment 3 View
2002-10-07 DRW Drawings-only black and white line drawings 4 View
2002-10-07 OATH Oath or Declaration filed 3 View
2002-04-18 TRNA Transmittal of New Application 1 View
2002-04-18 SPEC Specification 8 View
2002-04-18 CLM Claims 4 View
2002-04-18 ABST Abstract 1 View
2002-04-18 DRW Drawings-only black and white line drawings 4 View
2002-04-18 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
App. No.
10/126,469
Filed
2002-04-18
Granted
2003-10-21
Pub. No.
US20030022607A1
Art Unit
3723
PTA
-59 days