Granted Patent
Utility
PCT National Stage
US 6,787,053
· Confirmation No. 6367
CLEANING GASSES AND ETCHING GASES
Inventors:
Akira Sekiya, Yuki Mitsui, Ginjiro Tomizawa, Katsuya Fukae, Yutaka Ohira, Taisuke Yonemura
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2005-03-18 | COCOUT |
Certificate of Correction - Post Issue Communication | 1 | View | |
| 2005-01-03 | PETDEC |
Petition Decision | 1 | View | |
| 2004-10-19 | PET.OP |
Petition for review by the Office of Petitions | 5 | View | |
| 2004-03-03 | IFEE |
Issue Fee Payment (PTO-85B) | 2 | View | |
| 2003-12-09 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2003-12-09 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 1 | View | |
| 2003-12-09 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2003-12-09 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-09-22 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 2 | View | |
| 2003-09-22 | CLM |
Claims | 5 | View | |
| 2003-09-22 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2003-06-30 | CTNF |
Non-Final Rejection | 5 | View | |
| 2003-06-30 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2003-03-31 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2003-03-31 | FOR |
Foreign Reference | 10 | View | |
| 2003-03-11 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 5 | View | |
| 2003-01-23 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 2 | View | |
| 2003-01-23 | CLM |
Claims | 3 | View | |
| 2003-01-23 | SPEC |
Specification | 1 | View | |
| 2003-01-23 | ABST |
Abstract | 1 | View | |
| 2003-01-23 | REM |
Applicant Arguments/Remarks Made in an Amendment | 8 | View | |
| 2002-12-30 | C.AD |
Change of Address | 1 | View | |
| 2002-11-06 | CTNF |
Non-Final Rejection | 5 | View | |
| 2002-11-06 | 892 |
List of references cited by examiner | 1 | View | |
| 2002-11-06 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2002-11-04 | SRNT |
Examiner's search strategy and results | 6 | View | |
| 2002-07-29 | M903 |
Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed | 2 | View | |
| 2002-07-02 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2002-05-13 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-05-13 | SPEC |
Specification | 33 | View | |
| 2002-05-13 | CLM |
Claims | 5 | View | |
| 2002-05-13 | ABST |
Abstract | 1 | View | |
| 2002-05-13 | OATH |
Oath or Declaration filed | 4 | View | |
| 2002-05-13 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2002-05-13 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2002-05-13 | FWCLM |
Index of Claims | 1 | View | |
| 2002-05-13 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-05-13 | SPEC |
Specification | 33 | View | |
| 2002-05-13 | CLM |
Claims | 5 | View | |
| 2002-05-13 | ABST |
Abstract | 1 | View | |
| 2002-05-13 | OATH |
Oath or Declaration filed | 4 | View | |
| 2002-05-13 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-05-13 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-05-13 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2002-05-13 | FRPR |
Certified Copy of Foreign Priority Application | 1 | View | |
| 2002-05-13 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2002-05-13 | FOR |
Foreign Reference | 46 | View | |
| 2002-05-13 | FOR |
Foreign Reference | 12 | View | |
| 2002-05-13 | FOR |
Foreign Reference | 15 | View | |
| 2002-05-13 | FOR |
Foreign Reference | 15 | View | |
| 2002-05-13 | FOR |
Foreign Reference | 8 | View | |
| 2002-05-13 | FOR |
Foreign Reference | 10 | View | |
| 2002-05-13 | FOR |
Foreign Reference | 11 | View | |
| 2002-05-13 | 371P |
Documents submitted with 371 (National Stage) Applications | 23 | View |
Inventors
Akira Sekiya
Ibaraki, JAPAN
Yuki Mitsui
Tokyo, JAPAN
Ginjiro Tomizawa
Ibaraki, JAPAN
Katsuya Fukae
Gunma, JAPAN
Yutaka Ohira
Tokyo, JAPAN
Taisuke Yonemura
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
252/79.1
C23C16/4405
Y02P70/50
H10P50/242
H10P50/283
Y02C20/30
Prosecution
- Examiner
- OLSEN, ALLAN W
- Art Unit
- 1763
- Customer No.
- 22850
- Docket No.
- 223066USOXPCT
- Confirmation No.
- 6367
Foreign Priority
2000-275647
·
2000-09-11
·
JAPAN
2001-261471
·
2001-08-30
·
JAPAN
Publication
- Pub. No.
- US20030001134A1
- Pub. Date
- 2003-01-02
Patent Term Adjustment
-67days
CHANGE OF NAME
Recorded 2020-03-18
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2019-08-08
CORPORATE ADDRESS CHANGE
Recorded 2013-05-03
ASAHI GLASS COMPANY, LIMITED,
ANELVA CORPORATION,
ULVAC, INC.,
KANTO DENKA KOGYO CO., LTD.,
SANYO ELECTRIC CO., LTD.,
SONY CORPORATION,
DAIKIN INDUSTRIES, LTD.,
TOKYO ELECTRON LIMITED,
NEC ELELCTRONICS CORPORATION,
HITACHI KOKUSAI ELECTRIC INC.,
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.,
RENESAS TECHNOLOGY CORP.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-02-13
RESEARCH INSTITUTE OF INNOVATIVE TECHNOLOGY FOR THE EARTH,
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
from
OHIRA, YUTAKA,
MITSUI, YUKI,
TOMIZAWA, GINJIRO,
YONEMURA, TAISUKE,
SEKIYA, AKIRA,
FUKAE, KATSUYA
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-07-22
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Quick Facts
- Patent No.
- US 6,787,053
- App. No.
- 10/129,115
- Filed
- 2002-05-13
- Granted
- 2004-09-07
- Pub. No.
- US20030001134A1
- Examiner
- OLSEN, ALLAN W
- Art Unit
- 1763
- PTA
- -67 days
External Links