Patent Assignment
Reel/Frame 030342/0625
Corporate Address Change
Recorded: 2013-05-03
Received: 2013-05-03
Pages: 3
Assignor
KANTO DENKA KOGYO CO., LTD.
Executed: 2013-04-22
Assignee
KANTO DENKA KOGYO CO., LTD.
2-105, KANDA-AWAJICHO, CHIYODA-KU, TOKYO, JPX, 101-0063, JAPAN
Covered Properties
(6)
Process for Producing Carbonyl Fluoride
Application:
10/548,836 →
Cvd Apparatus and Method of Cleaning the Cvd Apparatus
Application:
10/492,539 →
Cleaning Gas and Etching Gas
Application:
10/480,285 →
Plasma Cleaning Gas and Plasma Cleaning Method
Application:
10/415,101 →
Method of Cleaning Cvd Device and Cleaning Device Therefor
Application:
10/276,305 →
Cleaning Gasses and Etching Gases
Application:
10/129,115 →