Plasma cleaning gas and plasma cleaning method
View Patent ↗A plasma cleaning gas for CVD chamber is a gas for cleaning silicon-containing deposits on the surface of a CVD chamber inner wall and the surfaces of members placed inside the CVD chamber after film forming treatment on a substrate by a plasma CVD apparatus. The cleaning gas includes 100% by volume of fluorine gas which gas can generate plasma by electric discharge. When 100% by volume of fluorine gas is plasma-generated by electric discharge and then used as a cleaning gas, an extremely excellent etching rate can be attained and further plasma can be stably generated even in the total gas flow rate of 1000 sccm and at a chamber pressure of 400 Pa. Further, the uniformity of cleaning can be also ensured in the above conditions. Additionally the fluorine gas concentration is 100% so that the apparatus is not complicated and thereby the cleaning gas has excellent practicability.
1. A process of plasma cleaning for CVD chambers, comprising cleaning silicon-containing deposits on a surface of an inner wall of a CVD chamber and surfaces of members placed inside the CVD chamber by plasma generated from 100% by volume of a fluorine gas by electric discharge, after film forming treatment on a substrate by a plasma CVD apparatus, wherein a chamber pressure in the plasma CVD apparatus is from 150 Pa to 1000 Pa, and a flow rate of the fluorine gas introduced into a plasma generating part is from 150 sccm to less than 1000 sccm during the plasma cleaning.
2. The process of plasma cleaning for CVD chambers according to claim 1 , wherein the silicon-containing deposits comprise at least one selected from the group consisting of:
(1) silicon,
(2) a compound comprising silicon and at least one of oxygen, nitrogen, fluorine and carbon, and
(3) a compound of a high melting point-having metal silicide.
3. The process of plasma cleaning for CVD chambers according to claim 1 , wherein a plasma generation from the fluorine gas is conducted by electric discharge in a process chamber of the plasma CVD apparatus, and the fluorine gas is introduced into the process chamber of the plasma CVD apparatus.
4. A process of plasma cleaning for CVD chambers, comprising cleaning silicon-containing deposits on a surface of an inner wall of a CVD chamber and surfaces of members placed inside the CVD chamber by plasma generated from a fluorine gas by electric discharge using a plasma cleaning gas for CVD chambers comprising the fluorine gas capable of generating plasma by electric discharge and a gas substantially incapable of reacting with fluorine in plasma, wherein a concentration of the fluorine gas is more than 20% by volume to less than 100% by volume, a concentration of the gas substantially incapable of reacting with fluorine in plasma is more than 0% by volume to not more than 80% by volume, a total concentration of the fluorine gas and the gas substantially incapable of reacting with fluorine is 100% by volume, after film forming treatment on a substrate by a plasma CVD apparatus, a pressure in the CVD chamber is from 150 Pa to 1000 Pa, and a flow rate of the fluorine gas is from 150 sccm to less than 1000 sccm during the plasma cleaning.
5. The process of plasma cleaning for CVD chambers according to claim 4 , wherein a plasma generation from the fluorine gas is conducted by electric discharge in a process chamber of the plasma CVD apparatus, and the fluorine gas is introduced into the process chamber of the CVD apparatus.
6. The process of plasma cleaning for CVD chambers according to claim 2 , wherein a plasma generation from the fluorine gas is conducted by electric discharge in a process chamber of the plasma CVD apparatus, and the fluorine gas is introduced into the process chamber of the CVD apparatus.