Granted Patent
Utility
US 6,727,028
· Confirmation No. 9167
PATTERN FORMATION METHOD, MASK FOR EXPOSURE USED FOR PATTERN FORMATION, AND METHOD OF MANUFACTURING THE SAME
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2008-05-07 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2008-04-02 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2004-03-17 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2002-04-26 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-04-26 | SPEC |
Specification | 18 | View | |
| 2002-04-26 | CLM |
Claims | 6 | View | |
| 2002-04-26 | ABST |
Abstract | 1 | View | |
| 2002-04-26 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2002-04-26 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Toshiya Kotani
Sagamihara-shi, JAPAN
Satoshi Tanaka
Kawasaki-shi, JAPAN
Soichi Inoue
Yokohama-shi, JAPAN
Attorneys & Agents of Record
Classification
USPC
430/5
H10P76/00
G03F1/36
G03F7/70433
G03F7/70441
Prosecution
- Examiner
- MOHAMEDULLA, SALEHA R
- Art Unit
- 1756
- Docket No.
- 04329.28515
- Confirmation No.
- 9167
Foreign Priority
2001-130969
·
2001-04-27
·
JAPAN
Publication
- Pub. No.
- US20020160279A1
- Pub. Date
- 2002-10-31
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2017-08-24
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-04-26
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Quick Facts
- Patent No.
- US 6,727,028
- App. No.
- 10/132,197
- Filed
- 2002-04-26
- Granted
- 2004-04-27
- Pub. No.
- US20020160279A1
- Examiner
- MOHAMEDULLA, SALEHA R
- Art Unit
- 1756
- PTA
- 0 days
External Links