Granted Patent
Utility
US 6,759,180
· Confirmation No. 3516
METHOD OF FABRICATING SUB-LITHOGRAPHIC SIZED LINE AND SPACE PATTERNS FOR NANO-IMPRINTING LITHOGRAPHY
Inventor:
Heon Lee
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-03-31 | IFEE |
Issue Fee Payment (PTO-85B) | 2 | View | |
| 2004-03-15 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-03-15 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-03-15 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-03-15 | FWCLM |
Index of Claims | 1 | View | |
| 2004-03-15 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-01-12 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2004-01-12 | CLM |
Claims | 4 | View | |
| 2004-01-12 | REM |
Applicant Arguments/Remarks Made in an Amendment | 8 | View | |
| 2004-01-12 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-10-08 | CTNF |
Non-Final Rejection | 4 | View | |
| 2003-10-08 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-09-26 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2002-04-23 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-04-23 | SPEC |
Specification | 14 | View | |
| 2002-04-23 | CLM |
Claims | 3 | View | |
| 2002-04-23 | ABST |
Abstract | 1 | View | |
| 2002-04-23 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2002-04-23 | OATH |
Oath or Declaration filed | 1 | View | |
| 2002-04-23 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2002-04-23 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2002-04-23 | FWCLM |
Index of Claims | 1 | View | |
| 2002-04-23 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-04-23 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2002-04-23 | SPEC |
Specification | 14 | View | |
| 2002-04-23 | CLM |
Claims | 3 | View | |
| 2002-04-23 | ABST |
Abstract | 1 | View | |
| 2002-04-23 | OATH |
Oath or Declaration filed | 1 | View | |
| 2002-04-23 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-04-23 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-04-23 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View |
Inventors
Heon Lee
Sunnyvale, CA
Attorneys & Agents of Record
Classification
USPC
430/313
B82Y10/00
G03F7/0002
H10P50/71
H10P50/73
H10P76/4088
B82Y40/00
G03F7/0017
Prosecution
- Examiner
- DUDA, KATHLEEN
- Art Unit
- 1756
- Docket No.
- 100201082-1
- Confirmation No.
- 3516
Publication
- Pub. No.
- US20030203319A1
- Pub. Date
- 2003-10-30
Patent Term Adjustment
-4days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2011-04-26
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-06-18
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Quick Facts
- Patent No.
- US 6,759,180
- App. No.
- 10/133,772
- Filed
- 2002-04-23
- Granted
- 2004-07-06
- Pub. No.
- US20030203319A1
- Examiner
- DUDA, KATHLEEN
- Art Unit
- 1756
- PTA
- -4 days
External Links