Patent Application
Utility
App. No. 10/134,915
· Confirmation No. 4546
MAGNETRON SPUTTER SOURCE WITH MULTIPART TARGET
Inventor:
Martin Durs
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-12-23 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2002-04-29 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-04-29 | SPEC |
Specification | 13 | View | |
| 2002-04-29 | CLM |
Claims | 4 | View | |
| 2002-04-29 | ABST |
Abstract | 1 | View | |
| 2002-04-29 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2002-04-29 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Martin Durs
Trubbach, SWITZERLAND
Attorneys & Agents of Record
Classification
USPC
204/192.12
C23C14/35
C23C14/548
Prosecution
- Examiner
- VERSTEEG, STEVEN H
- Art Unit
- 1753
- Customer No.
- 21706
- Docket No.
- H37-100 US
- Confirmation No.
- 4546
Foreign Priority
0804/01
·
2001-05-03
·
SWITZERLAND
Publication
- Pub. No.
- US20020162737A1
- Pub. Date
- 2002-11-07
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-01-20
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-01-17
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Quick Facts
- App. No.
- 10/134,915
- Filed
- 2002-04-29
- Granted
- 2004-02-17
- Pub. No.
- US20020162737A1
- Examiner
- VERSTEEG, STEVEN H
- Art Unit
- 1753
- PTA
- 0 days
External Links