Granted Patent
Utility
US 6,713,396
· Confirmation No. 7134
METHOD OF FABRICATING HIGH DENSITY SUB-LITHOGRAPHIC FEATURES ON A SUBSTRATE
Inventor:
Thomas C. Anthony
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-11-19 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-11-04 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2003-11-04 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2003-11-04 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2003-11-04 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-11-04 | FWCLM |
Index of Claims | 1 | View | |
| 2003-10-24 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2003-10-06 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2003-10-06 | CLM |
Claims | 5 | View | |
| 2003-10-06 | REM |
Applicant Arguments/Remarks Made in an Amendment | 13 | View | |
| 2003-10-06 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-07-02 | CTNF |
Non-Final Rejection | 6 | View | |
| 2003-07-02 | 892 |
List of references cited by examiner | 1 | View | |
| 2002-08-27 | OATH |
Oath or Declaration filed | 1 | View | |
| 2002-08-27 | LET. |
Miscellaneous Incoming Letter | 3 | View | |
| 2002-08-27 | XT/ |
Extension of Time | 1 | View | |
| 2002-06-11 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 2 | View | |
| 2002-04-29 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-04-29 | SPEC |
Specification | 16 | View | |
| 2002-04-29 | CLM |
Claims | 4 | View | |
| 2002-04-29 | ABST |
Abstract | 1 | View | |
| 2002-04-29 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2002-04-29 | OATH |
Oath or Declaration filed | 1 | View | |
| 2002-04-29 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2002-04-29 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2002-04-29 | FWCLM |
Index of Claims | 1 | View | |
| 2002-04-29 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-04-29 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2002-04-29 | SPEC |
Specification | 16 | View | |
| 2002-04-29 | CLM |
Claims | 4 | View | |
| 2002-04-29 | ABST |
Abstract | 1 | View | |
| 2002-04-29 | OATH |
Oath or Declaration filed | 1 | View | |
| 2002-04-29 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-04-29 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-04-29 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View |
Inventors
Thomas C. Anthony
Sunnyvale, CA
Attorneys & Agents of Record
Classification
USPC
438/694
H10P76/00
B82Y10/00
G03F7/0005
H10P76/4085
B82Y40/00
G03F7/0002
Prosecution
- Examiner
- TRAN, BINH X
- Art Unit
- 1765
- Docket No.
- 100202964-1
- Confirmation No.
- 7134
Publication
- Pub. No.
- US20030203636A1
- Pub. Date
- 2003-10-30
Patent Term Adjustment
-11days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2007-08-22
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-06-18
from
ANTHONY, THOMAS C.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-08-27
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Quick Facts
- Patent No.
- US 6,713,396
- App. No.
- 10/135,900
- Filed
- 2002-04-29
- Granted
- 2004-03-30
- Pub. No.
- US20030203636A1
- Examiner
- TRAN, BINH X
- Art Unit
- 1765
- PTA
- -11 days
External Links