Granted Patent
Utility
US 6,645,824
· Confirmation No. 9251
COMBINED OPTICAL PROFILOMETRY AND PROJECTION MICROSCOPY OF INTEGRATED CIRCUIT STRUCTURES
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-09-05 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-09-05 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2002-04-30 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-04-30 | ADS |
Application Data Sheet | 2 | View | |
| 2002-04-30 | SPEC |
Specification | 19 | View | |
| 2002-04-30 | CLM |
Claims | 13 | View | |
| 2002-04-30 | ABST |
Abstract | 1 | View | |
| 2002-04-30 | DRW |
Drawings-only black and white line drawings | 19 | View | |
| 2002-04-30 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Wenge Yang
Fremont, CA
Junwei Bao
Fremont, CA
Xinhui Niu
Los Altos, CA
Nickhil Jakatdar
Los Altos, CA
Yasuhiro Okumoto
Ibaraki, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/401
G01N21/4788
Y10S977/869
Y10S977/881
Prosecution
- Examiner
- TRAN, MAI HUONG C
- Art Unit
- 2818
- Customer No.
- 69792
- Docket No.
- 50998-20039.00(TTI-051)
- Confirmation No.
- 9251
Publication
- Pub. No.
- US20030203590A1
- Pub. Date
- 2003-10-30
Patent Term Adjustment
0days
No related applications found.
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Quick Facts
- Patent No.
- US 6,645,824
- App. No.
- 10/137,200
- Filed
- 2002-04-30
- Granted
- 2003-11-11
- Pub. No.
- US20030203590A1
- Examiner
- TRAN, MAI HUONG C
- Art Unit
- 2818
- PTA
- 0 days
External Links