IP Library › Granted Patent US 6,804,005
Granted Patent Utility
US 6,804,005 · Confirmation No. 3647

OVERLAY MEASUREMENTS USING ZERO-ORDER CROSS POLARIZATION MEASUREMENTS

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2009-06-03 C.AD Change of Address 2 View
2007-08-02 WFEE Fee Worksheet (SB06) 1 View
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2004-06-07 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
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2004-06-07 892 List of references cited by examiner 1 View
2004-06-07 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-06-07 FWCLM Index of Claims 1 View
2004-06-07 SRFW Search information including classification, databases and other search related notes 1 View
2004-05-27 SRNT Examiner's search strategy and results 2 View
2004-05-20 A.NE Response After Final Action 3 View
2004-05-20 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2004-03-18 CTFR Final Rejection 7 View
2004-03-18 1449 List of References cited by applicant and considered by examiner 2 View
2004-03-18 SRFW Search information including classification, databases and other search related notes 1 View
2004-03-18 FWCLM Index of Claims 1 View
2004-01-07 IDS Information Disclosure Statement (IDS) Form (SB08) 7 View
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2004-01-07 FOR Foreign Reference 16 View
2003-12-22 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2003-12-22 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-09-22 CTNF Non-Final Rejection 5 View
2003-09-22 892 List of references cited by examiner 1 View
2003-09-22 FWCLM Index of Claims 1 View
2003-09-22 SRFW Search information including classification, databases and other search related notes 1 View
2003-09-05 SRNT Examiner's search strategy and results 2 View
2002-05-02 TRNA Transmittal of New Application 2 View
2002-05-02 ADS Application Data Sheet 2 View
2002-05-02 SPEC Specification 21 View
2002-05-02 CLM Claims 25 View
2002-05-02 ABST Abstract 1 View
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2002-05-02 TRNA Transmittal of New Application 1 View
2002-05-02 WCLM Claims Worksheet (PTO-2022) 2 View
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Quick Facts
Patent No.
US 6,804,005
App. No.
10/138,903
Filed
2002-05-02
Granted
2004-10-12
Pub. No.
US20030206298A1
Examiner
PHAM, HOA Q
Art Unit
2877
PTA
-16 days