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App. No. 10/140,710 · Confirmation No. 7239

FOCUSED ION BEAM APPARATUS HAVING A GAS INJECTOR IN WHICH ONE OF A PLURALITY OF NOZZLES CAN BE SELECTIVELY DRIVEN FOR ELEVATION

Inventor: Yoshihiro Koyama
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2002-05-08 TRNA Transmittal of New Application 3 View
2002-05-08 SPEC Specification 14 View
2002-05-08 CLM Claims 2 View
2002-05-08 ABST Abstract 1 View
2002-05-08 DRW Drawings-only black and white line drawings 4 View
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Quick Facts
App. No.
10/140,710
Filed
2002-05-08
Granted
2003-06-10
Pub. No.
US20020171050A1
Art Unit
2881
PTA
-51 days