IP Library Granted Patent US 6,890,474
Granted Patent B2
US 6,890,474 · App. 10/142,273 · Granted May 10, 2005

Algorithm for enhancing the lifetime of critical components in a laser system

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Quick Facts
Patent No.
US 6,890,474
App. No.
10/142,273
Granted
May 10, 2005
Kind
B2
Abstract

A method and system are described aimed at substantially increasing the lifetime of sensitive optical elements subjected to high power laser radiation. The lifetime enhancement is accomplished by spatially distributing the laser beam spots both globally and locally according to algorithms that are custom tailored to the subject element as well as the system and application needs. The methods of the invention are particularly well-suited to non-linear crystals used to convert radiation from high repetition rate, diode-pumped laser systems into the UV spectral range, where lifetime requirements are particularly challenging. The methods of the invention further enable effective utilization of available experimental data characterizing the element's performance in combination with a stored library of preferred spot scanning patterns that may be executed on the surface of the element according to the selected algorithm.

Claims (27)

1. A method for optimizing lifetime of an optical element that has a clear aperture when subject to irradiation by at least one laser beam, comprising:

dividing the aperture into a matrix of macro-spots that each have a known degradation time constant and a quality factor;

selecting a spatial pattern of micro-spots within each macro-spot; and

translating the optical element through the micro-spot pattern with respect to a first laser beam according to a pre-determined first temporal sequence and increase a lifetime per macro-spot by at least a factor of 2.

2. The method of claim 1 , further comprising:

employing a second temporal sequence for relative translation of the optical element with respect to the first laser beam; and

exposing successive macro-spots to radiation each for a sufficient duration to complete a first temporal sequence.

3. The method of claim 2 , wherein the first temporal sequence is completed for each macro-spot.

4. The method of claim 1 , further comprising:

translating the optical element through the micro-spot pattern with respect to a second laser beam.

5. The method of claim 4 , wherein the first and second laser beams have different wavelengths.

6. The method of claim 4 , further comprising:

translating the optical element through the micro-Spot pattern with respect to a third laser beam.

7. The method of claim 6 , wherein the first, second and third laser beams each have different wavelengths.

8. The method of claim 6 , wherein at least of the first, second and third laser beams is in the UV spectral range.

9. The method of claim 1 , wherein the optical element is a non-linear crystal.

10. The method of claim 1 , wherein translation of the optical element with respect to the first laser beam is achieved while providing suitable conditions for phase matching.

11. The method of claim 10 , wherein the optical element is positioned in an oven during translation of the optical element with respect to the first laser beam.

12. The method of claim 11 , wherein the oven provides a suitable temperature for phase matching.

13. The method of claim 11 , wherein the oven provides an optical temperature for phase matching.

14. The method of claim 1 , wherein a lifetime per macro-spot of the optical element is increased by at least one order of magnitude.

15. The method of claim 1 , wherein an overall lifetime of the optical element is increased by at least one order of magnitude.

16. The method of claim 1 , wherein translation of the optical element with respect to the first laser beam is achieved by moving the optical element.

17. The method of claim 1 , wherein translation of the optical element with respect to the first laser beam is achieved by scanning the first laser beam across the optical element.

18. The method of claim 1 , further comprising:

using a feedback loop to access data received from at least one monitor that measures an unexpected drop in power of at least a portion of the micro-spots.

19. The method of claim 18 , wherein the feedback loop provides smooth transitions between the micro-spots.

Assignments (14)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048226/0095 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 038663/0265 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC; BARCLAYS BANK PLC
Reel/Frame 038663/0139 →
RELEASE OF SECURITY INTEREST Recorded Apr 29, 2016
From: JPMORGAN CHASE BANK N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 038581/0112 →
SECURITY AGREEMENT Recorded Jul 22, 2013
From: NEWPORT CORPORATION
To: JPMORGAN CHASE BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT
Reel/Frame 030847/0005 →
RELEASE OF SECURITY INTEREST Recorded Jul 19, 2013
From: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 030833/0421 →
MERGER AND CHANGE OF NAME Recorded Feb 3, 2012
From: SPECTRA-PHYSICS LASERS, INC.; SPECTRA-PHYSICS, INC.
To: NEWPORT CORPORATION
Reel/Frame 027845/0487 →
NOTICE OF GRANT OF SECURITY INTEREST IN PATENTS Recorded Oct 5, 2011
From: NEWPORT CORPORATION
To: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 027019/0462 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 16, 2002
From: GRUBER, LUKAS; HODGSON, NORMAN; HOFFMAN, HANNA J.; ANGSTENBERGER, JOERGE
To: SPECTRA PHYSICS, INC.
Reel/Frame 013208/0054 →