IP Library › Granted Patent US 6,566,196
Granted Patent Utility
US 6,566,196 · Confirmation No. 8198

SIDEWALL PROTECTION IN FABRICATION OF INTEGRATED CIRCUITS

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 Code Description Pages PDF
2002-05-15 TRNA Transmittal of New Application 1 View
2002-05-15 SPEC Specification 7 View
2002-05-15 CLM Claims 2 View
2002-05-15 ABST Abstract 1 View
2002-05-15 DRW Drawings-only black and white line drawings 5 View
2002-05-15 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,566,196
App. No.
10/146,979
Filed
2002-05-15
Granted
2003-05-20
Examiner
NHU, DAVID
Art Unit
2818
PTA
0 days