IP Library › Granted Patent US 6,698,728
Granted Patent Utility PCT National Stage
US 6,698,728 · Confirmation No. 7797

METHOD AND APPARATUS FOR DELIVERING PRECURSORS TO A PLURALITY OF EPITAXIAL REACTOR SITES

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Quick Facts
Patent No.
US 6,698,728
App. No.
10/149,092
Filed
2002-06-06
Granted
2004-03-02
Art Unit
3651
PTA
0 days