Granted Patent
Utility
PCT National Stage
US 6,698,728
· Confirmation No. 7797
METHOD AND APPARATUS FOR DELIVERING PRECURSORS TO A PLURALITY OF EPITAXIAL REACTOR SITES
Inventors:
Megan Ravetz, Graham Williams, Andrew Nelson, Roy Trevor Blunt, Howard Williams, Rajesh Odedra
Patented Case
View Patent ↗
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2008-02-04 | PA.. |
Power of Attorney | 3 | View | |
| 2008-02-04 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2007-05-17 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2007-05-17 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2004-01-12 | IFEE |
Issue Fee Payment (PTO-85B) | 3 | View | |
| 2002-06-06 | LET. |
Miscellaneous Incoming Letter | 28 | View |
Inventors
Megan Ravetz
Newton, UNITED KINGDOM
Graham Williams
Neston, UNITED KINGDOM
Andrew Nelson
Cowridge, UNITED KINGDOM
Roy Trevor Blunt
Cwmbran, UNITED KINGDOM
Howard Williams
St. Mellons, UNITED KINGDOM
Rajesh Odedra
Altrincham, UNITED KINGDOM
Attorneys & Agents of Record
Classification
USPC
406/155
C23C16/45561
C23C16/4482
C30B25/14
Prosecution
- Examiner
- DILLON JR, JOSEPH A
- Art Unit
- 3651
- Customer No.
- 28997
- Docket No.
- 5268E-000031-US
- Confirmation No.
- 7797
Foreign Priority
9929279.9
·
1999-12-11
·
UNITED KINGDOM
Patent Term Adjustment
0days
from
BLUNT, ROY TREVOR,
NELSON, ANDREW,
WILLIAMS, HOWARD,
ODEDRA, RAJESH,
RAVETZ, MEGAN,
WILLIAMS, GRAHAM
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-01-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-06-06
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Quick Facts
- Patent No.
- US 6,698,728
- App. No.
- 10/149,092
- Filed
- 2002-06-06
- Granted
- 2004-03-02
- Examiner
- DILLON JR, JOSEPH A
- Art Unit
- 3651
- PTA
- 0 days
External Links