IP Library › Patent Application 10150468
Patent Application Utility
App. No. 10/150,468 · Confirmation No. 3848

Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases

Abandoned -- Failure to Respond to an Office Action View Publication ↗
⬇ PDF
 Code Description Pages PDF
2005-10-07 ABN Abandonment 2 View
2005-03-09 CTNF Non-Final Rejection 15 View
2005-03-09 1449 List of References cited by applicant and considered by examiner 4 View
2005-03-09 892 List of references cited by examiner 1 View
2005-03-09 SRFW Search information including classification, databases and other search related notes 1 View
2005-03-09 FWCLM Index of Claims 1 View
2005-03-09 BIB Bibliographic Data Sheet 1 View
2005-03-04 SRNT Examiner's search strategy and results 1 View
2004-12-20 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-12-20 CLM Claims 5 View
2004-12-20 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2004-12-20 WFEE Fee Worksheet (SB06) 1 View
2004-12-03 CTRS Requirement for Restriction/Election 4 View
2004-12-03 FWCLM Index of Claims 1 View
2004-09-14 A.PE Preliminary Amendment 2 View
2004-09-14 CLM Claims 9 View
2004-09-14 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-09-14 WFEE Fee Worksheet (SB06) 1 View
2004-06-02 LET. Miscellaneous Incoming Letter 3 View
2002-05-17 TRNA Transmittal of New Application 3 View
2002-05-17 A.PE Preliminary Amendment 2 View
2002-05-17 SPEC Specification 28 View
2002-05-17 CLM Claims 5 View
2002-05-17 ABST Abstract 1 View
2002-05-17 DRW Drawings-only black and white line drawings 4 View
2002-05-17 OATH Oath or Declaration filed 2 View
2002-05-17 WFEE Fee Worksheet (SB06) 1 View
2002-05-17 WCLM Claims Worksheet (PTO-2022) 1 View
2002-05-17 WFEE Fee Worksheet (SB06) 1 View
2002-05-17 IDS Information Disclosure Statement (IDS) Form (SB08) 7 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
10/150,468
Filed
2002-05-17
Pub. No.
US20020159924A1
Art Unit
1764