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App. No. 10/150,989 · Confirmation No. 3666

PLASMA ETCH RESISTANT COATING AND PROCESS

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2007-06-11 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2005-12-20 COCOUT Certificate of Correction - Post Issue Communication 1 View
2005-12-08 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2005-10-31 COCIN Request for Certificate of Correction 2 View
2004-08-11 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-08-06 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-07-13 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-07-13 1449 List of References cited by applicant and considered by examiner 2 View
2004-07-12 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-07-12 LET. Miscellaneous Incoming Letter 3 View
2004-07-06 RUSH Printer Query form, used by the publications branch 2 View
2004-06-21 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2004-05-17 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-17 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-17 892 List of references cited by examiner 1 View
2004-05-17 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-05-17 SRFW Search information including classification, databases and other search related notes 1 View
2004-05-17 SRNT Examiner's search strategy and results 1 View
2004-03-23 WFEE Fee Worksheet (SB06) 1 View
2004-03-23 FWCLM Index of Claims 1 View
2004-03-15 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2004-03-15 CLM Claims 2 View
2004-03-15 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-12-10 CTNF Non-Final Rejection 7 View
2003-12-10 1449 List of References cited by applicant and considered by examiner 3 View
2003-12-10 892 List of references cited by examiner 1 View
2003-12-10 SRFW Search information including classification, databases and other search related notes 1 View
2003-12-10 FWCLM Index of Claims 1 View
2003-12-10 SRNT Examiner's search strategy and results 1 View
2003-10-30 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-09-26 ELC. Response to Election / Restriction Filed 3 View
2003-09-17 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2003-09-17 FOR Foreign Reference 18 View
2003-09-17 FOR Foreign Reference 70 View
2003-09-17 FOR Foreign Reference 20 View
2003-09-17 FOR Foreign Reference 9 View
2003-09-15 CTRS Requirement for Restriction/Election 5 View
2003-09-15 FWCLM Index of Claims 1 View
2002-06-18 TRNA Transmittal of New Application 1 View
2002-06-18 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-05-17 TRNA Transmittal of New Application 3 View
2002-05-17 SPEC Specification 16 View
2002-05-17 CLM Claims 2 View
2002-05-17 ABST Abstract 1 View
2002-05-17 DRW Drawings-only black and white line drawings 4 View
2002-05-17 OATH Oath or Declaration filed 5 View
2002-05-17 TRNA Transmittal of New Application 3 View
2002-05-17 SPEC Specification 16 View
2002-05-17 CLM Claims 2 View
2002-05-17 ABST Abstract 1 View
2002-05-17 DRW Drawings-only black and white line drawings 4 View
2002-05-17 OATH Oath or Declaration filed 5 View
2002-05-17 WFEE Fee Worksheet (SB06) 1 View
2002-05-17 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/150,989
Filed
2002-05-17
Granted
2004-11-30
Pub. No.
US20030215963A1
Examiner
LE, THAO P
Art Unit
2818
PTA
-39 days