IP Library Granted Patent US 6,690,502
Granted Patent Utility
US 6,690,502 · Confirmation No. 8371

DOUBLE SUBSTRATE REFLECTIVE SPATIAL LIGHT MODULATOR WITH SELF-LIMITING MICRO-MECHANICAL ELEMENTS

Inventor: Andrew G. Huibers
⬇ PDF
Code Description Pages PDF
2015-08-19 IMIS Miscellaneous Internal Document 1 View
2003-12-17 NFEE Notice of Additional Fee Due 1 View
2003-11-28 IFEE Issue Fee Payment (PTO-85B) 2 View
2002-05-20 TRNA Transmittal of New Application 4 View
2002-05-20 SPEC Specification 38 View
2002-05-20 CLM Claims 10 View
2002-05-20 ABST Abstract 1 View
2002-05-20 DRW Drawings-only black and white line drawings 18 View
2002-05-20 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,690,502
App. No.
10/153,138
Filed
2002-05-20
Granted
2004-02-10
Pub. No.
US20020176150A1
Art Unit
2873
PTA
-276 days