IP Library Granted Patent US 6,569,726
Granted Patent Utility
US 6,569,726 · Confirmation No. 1655

METHOD OF MANUFACTURING MOS TRANSISTOR WITH FLUORIDE IMPLANTATION ON SILICON NITRIDE ETCHING STOP LAYER

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Code Description Pages PDF
2002-05-22 TRNA Transmittal of New Application 2 View
2002-05-22 A.PE Preliminary Amendment 2 View
2002-05-22 SPEC Specification 7 View
2002-05-22 CLM Claims 3 View
2002-05-22 ABST Abstract 1 View
2002-05-22 DRW Drawings-only black and white line drawings 4 View
2002-05-22 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,569,726
App. No.
10/154,604
Filed
2002-05-22
Granted
2003-05-27
Pub. No.
US20030096483A1
Art Unit
2813
PTA
0 days