IP Library › Granted Patent US 6,806,971
Granted Patent Utility
US 6,806,971 · Confirmation No. 9630

METHOD AND APPARATUS FOR PROCESS CONTROL IN SEMICONDUCTOR MANUFACTURE

Inventor: Moshe Finarov
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2004-06-22 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2004-03-26 CTNF Non-Final Rejection 11 View
2004-03-26 1449 List of References cited by applicant and considered by examiner 2 View
2004-03-26 892 List of references cited by examiner 1 View
2004-03-26 FWCLM Index of Claims 1 View
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2002-05-28 TRNA Transmittal of New Application 2 View
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Quick Facts
Patent No.
US 6,806,971
App. No.
10/155,236
Filed
2002-05-28
Granted
2004-10-19
Pub. No.
US20030030822A1
Art Unit
2877
PTA
0 days