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App. No. 10/156,879 · Confirmation No. 7443

GASDYNAMICALLY-CONTROLLED DROPLETS AS THE TARGET IN A LASER-PLASMA EXTREME ULTRAVIOLET LIGHT SOURCE

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2003-12-17 CLM Claims 10 View
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2002-05-28 FWCLM Index of Claims 1 View
2002-05-28 TRNA Transmittal of New Application 3 View
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Quick Facts
App. No.
10/156,879
Filed
2002-05-28
Granted
2004-05-18
Pub. No.
US20030223546A1
Art Unit
2882
PTA
-47 days