IP Library › Patent Application 10157222
Patent Application Utility
App. No. 10/157,222 · Confirmation No. 5608

TARGET STEERING SYSTEM FOR EUV DROPLET GENERATORS

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2008-01-09 C.AD Change of Address 1 View
2004-05-13 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-05-13 1449 List of References cited by applicant and considered by examiner 1 View
2004-05-13 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-01-29 RUSH Printer Query form, used by the publications branch 2 View
2004-01-08 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-01-08 LET. Miscellaneous Incoming Letter 2 View
2004-01-08 DRW Drawings-only black and white line drawings 1 View
2003-11-25 WFEE Fee Worksheet (SB06) 1 View
2003-11-25 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-11-25 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-11-25 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-11-25 SRFW Search information including classification, databases and other search related notes 1 View
2003-11-25 FWCLM Index of Claims 1 View
2003-11-18 IDS Information Disclosure Statement (IDS) Form (SB08) 7 View
2003-10-17 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-10-17 CLM Claims 5 View
2003-10-17 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-09-04 CTNF Non-Final Rejection 7 View
2003-09-04 892 List of references cited by examiner 1 View
2003-09-04 1449 List of References cited by applicant and considered by examiner 1 View
2003-07-07 C.AD Change of Address 2 View
2003-05-21 LET. Miscellaneous Incoming Letter 2 View
2002-05-28 TRNA Transmittal of New Application 3 View
2002-05-28 SPEC Specification 9 View
2002-05-28 CLM Claims 4 View
2002-05-28 ABST Abstract 1 View
2002-05-28 DRW Drawings-only black and white line drawings 1 View
2002-05-28 OATH Oath or Declaration filed 3 View
2002-05-28 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-05-28 SRFW Search information including classification, databases and other search related notes 1 View
2002-05-28 FWCLM Index of Claims 1 View
2002-05-28 TRNA Transmittal of New Application 3 View
2002-05-28 DRW Drawings-only black and white line drawings 1 View
2002-05-28 SPEC Specification 9 View
2002-05-28 CLM Claims 4 View
2002-05-28 ABST Abstract 1 View
2002-05-28 OATH Oath or Declaration filed 3 View
2002-05-28 WFEE Fee Worksheet (SB06) 1 View
2002-05-28 WFEE Fee Worksheet (SB06) 1 View
2002-05-28 WCLM Claims Worksheet (PTO-2022) 1 View
2002-05-28 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
10/157,222
Filed
2002-05-28
Granted
2004-09-14
Pub. No.
US20030223541A1
Examiner
YUN, JURIE
Art Unit
2882
PTA
-120 days