IP Library Granted Patent US 6,682,637
Granted Patent Utility
US 6,682,637 · Confirmation No. 4854

MAGNETRON SPUTTER SOURCE

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Code Description Pages PDF
2003-11-10 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-10-27 A.NA Amendment after Notice of Allowance (Rule 312) 1 View
2003-10-27 SPEC Specification 1 View
2003-10-27 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2003-10-27 LET. Miscellaneous Incoming Letter 1 View
2003-10-27 DRW Drawings-only black and white line drawings 4 View
2002-06-04 TRNA Transmittal of New Application 3 View
2002-06-04 A.PE Preliminary Amendment 6 View
2002-06-04 SPEC Specification 16 View
2002-06-04 CLM Claims 3 View
2002-06-04 ABST Abstract 1 View
2002-06-04 DRW Drawings-only black and white line drawings 4 View
2002-06-04 OATH Oath or Declaration filed 4 View
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Quick Facts
Patent No.
US 6,682,637
App. No.
10/161,862
Filed
2002-06-04
Granted
2004-01-27
Pub. No.
US20030136671A1
Art Unit
1753
PTA
-25 days