Granted Patent
Utility
US 6,682,637
· Confirmation No. 4854
MAGNETRON SPUTTER SOURCE
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-11-10 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-10-27 | A.NA |
Amendment after Notice of Allowance (Rule 312) | 1 | View | |
| 2003-10-27 | SPEC |
Specification | 1 | View | |
| 2003-10-27 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2003-10-27 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-10-27 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2002-06-04 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-06-04 | A.PE |
Preliminary Amendment | 6 | View | |
| 2002-06-04 | SPEC |
Specification | 16 | View | |
| 2002-06-04 | CLM |
Claims | 3 | View | |
| 2002-06-04 | ABST |
Abstract | 1 | View | |
| 2002-06-04 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2002-06-04 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Bernd Heinz
Sevelen, SWITZERLAND
Martin Dubs
Trubbach, SWITZERLAND
Thomas Eisenhammer
Azmoos, SWITZERLAND
Pius Grunenfelder
Wangs, SWITZERLAND
Walter Haag
Grabs, SWITZERLAND
Stanislav Kadlec
Buchs, SWITZERLAND
Siegfried Krassnitzer
Feldkirch, AUSTRALIA
Attorneys & Agents of Record
Classification
USPC
204/298.2
H01J37/3408
Prosecution
- Examiner
- MCDONALD, RODNEY GLENN
- Art Unit
- 1753
- Customer No.
- 21706
- Docket No.
- H37-101 US
- Confirmation No.
- 4854
Foreign Priority
2001 1052/01
·
2001-06-12
·
SWITZERLAND
Publication
- Pub. No.
- US20030136671A1
- Pub. Date
- 2003-07-24
Patent Term Adjustment
-25days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-01-20
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-01-17
from
DUBS, MARTIN,
EISENHAMMER, THOMAS,
GRUNENFELDER, PIUS,
HAAG, WALTER,
HEINZ, BERND,
KADLEC, STAINSLAV,
KRASSNITZER, SIEGFRIED
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-06-04
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- Patent No.
- US 6,682,637
- App. No.
- 10/161,862
- Filed
- 2002-06-04
- Granted
- 2004-01-27
- Pub. No.
- US20030136671A1
- Examiner
- MCDONALD, RODNEY GLENN
- Art Unit
- 1753
- PTA
- -25 days
External Links