IP Library Patent Application 10170195
Patent Application Utility
App. No. 10/170,195 · Confirmation No. 6247

FACING TARGET ASSEMBLY AND SPUTTER DEPOSITION APPARATUS

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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Code Description Pages PDF
2003-12-18 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-12-18 LET. Miscellaneous Incoming Letter 1 View
2003-12-18 DRW Drawings-only black and white line drawings 2 View
2002-06-13 TRNA Transmittal of New Application 2 View
2002-06-13 SPEC Specification 15 View
2002-06-13 CLM Claims 6 View
2002-06-13 ABST Abstract 1 View
2002-06-13 DRW Drawings-only black and white line drawings 2 View
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Quick Facts
App. No.
10/170,195
Filed
2002-06-13
Granted
2004-02-10
Art Unit
1753
PTA
-55 days