IP Library › Patent Application 10173040
Patent Application Utility Small
App. No. 10/173,040 · Confirmation No. 5929

Method and system for fast on-line electro-optical detection of wafer defects

Inventor: Gad Neumann
Expressly Abandoned -- During Examination
⬇ PDF
 Code Description Pages PDF
2002-06-18 TRNA Transmittal of New Application 4 View
2002-06-18 SPEC Specification 35 View
2002-06-18 CLM Claims 5 View
2002-06-18 ABST Abstract 1 View
2002-06-18 DRW Drawings-only black and white line drawings 6 View
2002-06-18 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
10/173,040
Filed
2002-06-18
Art Unit
2613