IP Library › Granted Patent US 6,693,664
Granted Patent Utility
US 6,693,664 · Confirmation No. 2431

METHOD AND SYSTEM FOR FAST ON-LINE ELECTRO-OPTICAL DETECTION OF WAFER DEFECTS

Inventor: Gad Neumann
Patented Case View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2010-10-04 LET. Miscellaneous Incoming Letter 1 View
2010-10-04 N417 Electronic Filing System Acknowledgment Receipt 2 View
2003-11-12 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-11-12 A.NA Amendment after Notice of Allowance (Rule 312) 1 View
2003-11-12 SPEC Specification 1 View
2003-11-12 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-11-12 LET. Miscellaneous Incoming Letter 1 View
2003-11-12 DRW Drawings-only black and white line drawings 6 View
2002-12-16 TRNA Transmittal of New Application 4 View
2002-12-16 SPEC Specification 35 View
2002-12-16 CLM Claims 5 View
2002-12-16 ABST Abstract 1 View
2002-12-16 DRW Drawings-only black and white line drawings 6 View
2002-12-16 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,693,664
App. No.
10/319,716
Filed
2002-12-16
Granted
2004-02-17
Pub. No.
US20030133604A1
Art Unit
2613
PTA
-98 days