IP Library › Granted Patent US 6,800,403
Granted Patent Utility
US 6,800,403 · Confirmation No. 8318

TECHNIQUES TO CHARACTERIZE ISO-DENSE EFFECTS FOR MICRODEVICE MANUFACTURE

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Quick Facts
Patent No.
US 6,800,403
App. No.
10/175,367
Filed
2002-06-18
Granted
2004-10-05
Pub. No.
US20030232253A1
Art Unit
1756
PTA
0 days