IP Library › Granted Patent US 6,765,680
Granted Patent Utility
US 6,765,680 · Confirmation No. 2891

METHODS OF TESTING AND MANUFACTURING MICRO-ELECTRICAL MECHANICAL MIRRORS

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Quick Facts
Patent No.
US 6,765,680
App. No.
10/176,773
Filed
2002-06-21
Granted
2004-07-20
Pub. No.
US20030234934A1
Examiner
LEE, HWA S
Art Unit
2877
PTA
0 days