IP Library Patent Application 10184163
Patent Application Utility
App. No. 10/184,163 · Confirmation No. 3084

BELT WIPER FOR A CHEMICAL MECHANICAL PLANARIZATION SYSTEM

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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Code Description Pages PDF
2003-10-27 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-09-23 TRNA Transmittal of New Application 2 View
2002-09-23 DRW Drawings-only black and white line drawings 9 View
2002-06-26 TRNA Transmittal of New Application 3 View
2002-06-26 SPEC Specification 19 View
2002-06-26 CLM Claims 6 View
2002-06-26 ABST Abstract 1 View
2002-06-26 DRW Drawings-only black and white line drawings 9 View
2002-06-26 OATH Oath or Declaration filed 4 View
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Quick Facts
App. No.
10/184,163
Filed
2002-06-26
Granted
2003-12-23
Art Unit
3723
PTA
-2 days