IP Library › Granted Patent US 6,567,278
Granted Patent Utility
US 6,567,278 · Confirmation No. 7902

ELECTRICAL POWER SUPPLY SUITABLE IN PARTICULAR FOR DC PLASMA PROCESSING

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2017-10-26 OATH Oath or Declaration filed 16 View
2013-06-25 IMIS Miscellaneous Internal Document 1 View
2002-06-27 TRNA Transmittal of New Application 1 View
2002-06-27 ADS Application Data Sheet 2 View
2002-06-27 A.PE Preliminary Amendment 5 View
2002-06-27 SPEC Specification 27 View
2002-06-27 CLM Claims 9 View
2002-06-27 ABST Abstract 1 View
2002-06-27 DRW Drawings-only black and white line drawings 16 View
2002-06-27 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,567,278
App. No.
10/185,822
Filed
2002-06-27
Granted
2003-05-20
Pub. No.
US20030021125A1
Examiner
VU, BAO Q
Art Unit
2838
PTA
-7 days