IP Library › Granted Patent US 6,733,619
Granted Patent Utility
US 6,733,619 · Confirmation No. 2645

APPARATUS FOR INTEGRATED MONITORING OF WAFERS AND FOR PROCESS CONTROL IN SEMICONDUCTOR MANUFACTURING AND A METHOD FOR USE THEREOF

Inventor: Moshe Finarov
Patented Case View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2015-07-29 IMIS Miscellaneous Internal Document 2 View
2008-07-22 PET.AUTO ePetition Request Form 3 View
2008-07-22 WFEE Fee Worksheet (SB06) 2 View
2008-07-22 PET.DEC.AUTO ePetition Grant Letter 1 View
2008-07-22 N417 Electronic Filing System Acknowledgment Receipt 2 View
2004-03-02 IFEE Issue Fee Payment (PTO-85B) 4 View
2004-01-05 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-01-05 NOA Notice of Allowance and Fees Due (PTOL-85) 2 View
2004-01-05 1449 List of References cited by applicant and considered by examiner 1 View
2004-01-05 FWCLM Index of Claims 1 View
2004-01-05 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-01-05 SRFW Search information including classification, databases and other search related notes 1 View
2003-12-15 SRNT Examiner's search strategy and results 3 View
2003-09-29 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-09-29 CLM Claims 4 View
2003-09-29 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-09-29 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-09-29 LET. Miscellaneous Incoming Letter 2 View
2003-09-29 XT/ Extension of Time 1 View
2003-04-30 CTNF Non-Final Rejection 6 View
2003-04-30 892 List of references cited by examiner 1 View
2003-04-30 FOR Foreign Reference 9 View
2003-04-30 FOR Foreign Reference 6 View
2003-04-30 FOR Foreign Reference 9 View
2003-04-19 SRNT Examiner's search strategy and results 3 View
2003-04-06 SRNT Examiner's search strategy and results 13 View
2002-07-15 TRNA Transmittal of New Application 2 View
2002-07-15 SPEC Specification 18 View
2002-07-15 CLM Claims 3 View
2002-07-15 ABST Abstract 1 View
2002-07-15 DRW Drawings-only black and white line drawings 8 View
2002-07-15 OATH Oath or Declaration filed 2 View
2002-07-15 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-07-15 SRFW Search information including classification, databases and other search related notes 1 View
2002-07-15 FWCLM Index of Claims 1 View
2002-07-15 TRNA Transmittal of New Application 2 View
2002-07-15 DRW Drawings-only black and white line drawings 8 View
2002-07-15 SPEC Specification 18 View
2002-07-15 CLM Claims 3 View
2002-07-15 ABST Abstract 1 View
2002-07-15 OATH Oath or Declaration filed 2 View
2002-07-15 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
Patent No.
US 6,733,619
App. No.
10/193,911
Filed
2002-07-15
Granted
2004-05-11
Pub. No.
US20020179841A1
Art Unit
1763
PTA
-61 days