IP Library › Granted Patent US 6,794,303
Granted Patent Utility
US 6,794,303 · Confirmation No. 9981

TWO STAGE ETCHING OF SILICON NITRIDE TO FORM A NITRIDE SPACER

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2005-07-21 COCOUT Certificate of Correction - Post Issue Communication 5 View
2005-06-29 IMIS Miscellaneous Internal Document 1 View
2004-12-09 IMIS Miscellaneous Internal Document 1 View
2004-10-04 COCIN Request for Certificate of Correction 10 View
2004-04-28 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2004-04-28 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-04-28 DRW Drawings-only black and white line drawings 1 View
2004-04-12 XRUSH Internal Response to Printer Query from Technology Center(TC) 3 View
2004-03-01 C.AD Change of Address 1 View
2004-02-24 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-02-24 LET. Miscellaneous Incoming Letter 1 View
2004-02-24 DRW Drawings-only black and white line drawings 4 View
2003-12-08 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-12-08 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-12-08 1449 List of References cited by applicant and considered by examiner 1 View
2003-12-08 892 List of references cited by examiner 1 View
2003-12-08 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 2 View
2003-12-08 FWCLM Index of Claims 1 View
2003-12-08 SRFW Search information including classification, databases and other search related notes 1 View
2003-10-09 ELC. Response to Election / Restriction Filed 7 View
2003-09-05 CTRS Requirement for Restriction/Election 5 View
2003-08-27 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-04-24 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2003-03-27 PA.. Power of Attorney 2 View
2002-07-18 TRNA Transmittal of New Application 1 View
2002-07-18 SPEC Specification 18 View
2002-07-18 CLM Claims 6 View
2002-07-18 ABST Abstract 1 View
2002-07-18 DRW Drawings-only black and white line drawings 6 View
2002-07-18 OATH Oath or Declaration filed 2 View
2002-07-18 LET. Miscellaneous Incoming Letter 1 View
2002-07-18 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-07-18 SRFW Search information including classification, databases and other search related notes 1 View
2002-07-18 FWCLM Index of Claims 1 View
2002-07-18 TRNA Transmittal of New Application 1 View
2002-07-18 DRW Drawings-only black and white line drawings 6 View
2002-07-18 SPEC Specification 18 View
2002-07-18 CLM Claims 6 View
2002-07-18 ABST Abstract 1 View
2002-07-18 OATH Oath or Declaration filed 2 View
2002-07-18 WFEE Fee Worksheet (SB06) 1 View
2002-07-18 WFEE Fee Worksheet (SB06) 1 View
2002-07-18 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
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Quick Facts
Patent No.
US 6,794,303
App. No.
10/198,825
Filed
2002-07-18
Granted
2004-09-21
Pub. No.
US20040014305A1
Art Unit
2829
PTA
-184 days