IP Library › Granted Patent US 6,638,839
Granted Patent Utility Small
US 6,638,839 · Confirmation No. 7656

NOVEL HOT-FILAMENT CHEMICAL VAPOR DEPOSITION CHAMBER AND PROCESS WITH MULTIPLE GAS INLETS

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 Code Description Pages PDF
2003-08-13 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-08-13 LET. Miscellaneous Incoming Letter 1 View
2002-07-25 TRNA Transmittal of New Application 1 View
2002-07-25 ADS Application Data Sheet 6 View
2002-07-25 SPEC Specification 13 View
2002-07-25 CLM Claims 4 View
2002-07-25 ABST Abstract 1 View
2002-07-25 DRW Drawings-only black and white line drawings 2 View
2002-07-25 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
Patent No.
US 6,638,839
App. No.
10/205,481
Filed
2002-07-25
Granted
2003-10-28
Pub. No.
US20030032265A1
Art Unit
2812
PTA
0 days