IP Library › Granted Patent US 6,817,822
Granted Patent Utility
US 6,817,822 · Confirmation No. 7509

LOAD PORT, WAFER PROCESSING APPARATUS, AND METHOD OF REPLACING ATMOSPHERE

Inventor: Kenji Tokunaga
Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2004-09-27 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-07-08 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-07-08 NOA Notice of Allowance and Fees Due (PTOL-85) 1 View
2004-07-08 1449 List of References cited by applicant and considered by examiner 2 View
2004-07-08 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2004-07-08 SRFW Search information including classification, databases and other search related notes 1 View
2004-07-08 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-05-05 A.NE Response After Final Action 3 View
2004-05-05 CLM Claims 2 View
2004-05-05 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-05-05 WFEE Fee Worksheet (SB06) 1 View
2004-04-05 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2004-04-05 FOR Foreign Reference 7 View
2004-04-05 FOR Foreign Reference 8 View
2004-04-05 FOR Foreign Reference 13 View
2004-03-09 CTFR Final Rejection 6 View
2004-03-09 892 List of references cited by examiner 1 View
2003-12-29 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-12-29 CLM Claims 3 View
2003-12-29 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-12-29 LET. Miscellaneous Incoming Letter 2 View
2003-09-30 CTNF Non-Final Rejection 4 View
2003-09-30 892 List of references cited by examiner 1 View
2003-09-30 FOR Foreign Reference 14 View
2003-08-21 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2003-08-21 FOR Foreign Reference 14 View
2003-08-21 FOR Foreign Reference 10 View
2003-08-21 FOR Foreign Reference 23 View
2003-04-03 C.AD Change of Address 1 View
2002-10-23 PEFR Applicant Response to Pre-Exam Formalities Notice 4 View
2002-10-23 OATH Oath or Declaration filed 3 View
2002-08-23 PEFN Pre-Exam Formalities Notice 2 View
2002-07-30 TRNA Transmittal of New Application 2 View
2002-07-30 ADS Application Data Sheet 2 View
2002-07-30 SPEC Specification 17 View
2002-07-30 CLM Claims 2 View
2002-07-30 ABST Abstract 1 View
2002-07-30 DRW Drawings-only black and white line drawings 10 View
2002-07-30 OATH Oath or Declaration filed 3 View
2002-07-30 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-07-30 SRFW Search information including classification, databases and other search related notes 1 View
2002-07-30 FWCLM Index of Claims 1 View
2002-07-30 TRNA Transmittal of New Application 2 View
2002-07-30 DRW Drawings-only black and white line drawings 10 View
2002-07-30 SPEC Specification 17 View
2002-07-30 CLM Claims 2 View
2002-07-30 ABST Abstract 1 View
2002-07-30 WFEE Fee Worksheet (SB06) 1 View
2002-07-30 FRPR Certified Copy of Foreign Priority Application 34 View
2002-07-30 ADS Application Data Sheet 2 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,817,822
App. No.
10/207,011
Filed
2002-07-30
Granted
2004-11-16
Pub. No.
US20030031537A1
Art Unit
3652
PTA
0 days