Low Cu percentages for reducing shorts in AlCu lines
View Patent ↗In a method of fabricating a metallization structure during formation of a microelectronic device, the improvement of reducing metal shorts in blanket metal deposition layers later subjected to reactive ion etching, comprising: a) depositing on a first underlayer, a blanket of an aluminum compound containing an electrical short reducing amount of an alloy metal in electrical contact with the underlayer; b) depositing a photoresist and exposing and developing to leave patterns of photoresist on the blanket aluminum compound containing an electrical short reducing amount of an alloy metal; and c) reactive ion etching to obtain an aluminum compound containing an alloy metal line characterized by reduced shorts in amounts less than the aluminum compound without said short reducing amount of alloy metal.
1. A method of fabricating a metallization structure, the method comprising the steps of:
depositing on an underlayer a blanket of an aluminum (Al) compound in electrical contact with said underlayer, the underlayer comprising a first TiN layer formed over a first Ti layer, the aluminum compound containing about 0.2% by weight of Cu;
depositing a photoresist and exposing and developing to pattern the aluminum compound; and
reactive ion etching the aluminum compound.
2. The method of claim 1 wherein said depositing of the Al compound is chemical vapor deposition or physical vapor deposition.
3. The method of claim 1 wherein said depositing of the Al compound is physical vapor deposition.
4. The method of claim 1 wherein said depositing of the Al compound is sputter deposition.
5. The method of claim 1 wherein said photoresist includes use of an anti-reflective coating.
6. The method of claim 1 further comprising, prior to depositing the photoresist, depositing another layer over said blanket of aluminum compound, said another layer comprising a material selected from the group consisting of TiN and Ti.
7. The method of claim 1 further comprising, prior to depositing the photoresist, depositing a second Ti layer over said blanket of aluminum compound and a second TiN layer over said second Ti layer.
8. A method for fabricating a metallization structure for a microelectronic device, the method comprising the steps of:
depositing an underlayer, said underlayer comprising a layer of Ti covered by a layer of TiN;
depositing a blanket of an aluminum compound in electrical contact with said underlayer of TiN, the aluminum compound containing about 0.2% by weight of Cu;
depositing a top layer over said blanket of aluminum compound, said top layer comprising a layer of Ti covered by a layer of TiN;
depositing a layer of photoresist over said top layer;
exposing and developing said photoresist to form a pattern of photoresist on the blanket of aluminum compound; and
reactive ion etching to form aluminum compound lines.
9. The method of claim 8 wherein said step of depositing blanket of aluminum compound is by sputter deposition.
10. The method of claim 8 wherein said layer of photoresist comprises an antireflective coating.