Patent Application
Utility
App. No. 10/218,242
· Confirmation No. 6751
METHOD OF MEASURING SURFACE FORM OF SEMICONDUCTOR THIN FILM
Inventor:
Makoto Nakazawa
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-08-15 | TRNA |
Transmittal of New Application | 4 | View | |
| 2002-08-15 | A.PE |
Preliminary Amendment | 2 | View | |
| 2002-08-15 | SPEC |
Specification | 19 | View | |
| 2002-08-15 | CLM |
Claims | 4 | View | |
| 2002-08-15 | ABST |
Abstract | 1 | View | |
| 2002-08-15 | DRW |
Drawings-only black and white line drawings | 16 | View | |
| 2002-08-15 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Makoto Nakazawa
Miyagi, JAPAN
Attorneys & Agents of Record
Classification
USPC
356/369
G01N21/211
G01B11/0641
G01N21/8422
Prosecution
- Examiner
- PUNNOOSE, ROY M
- Art Unit
- 2877
- Docket No.
- KKH.051D
- Confirmation No.
- 6751
Foreign Priority
JP2000-55603
·
2000-03-01
·
JAPAN
Publication
- Pub. No.
- US20020191187A1
- Pub. Date
- 2002-12-19
Patent Term Adjustment
0days
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Quick Facts
- App. No.
- 10/218,242
- Filed
- 2002-08-15
- Granted
- 2003-08-26
- Pub. No.
- US20020191187A1
- Examiner
- PUNNOOSE, ROY M
- Art Unit
- 2877
- PTA
- 0 days
External Links