IP Library › Granted Patent US 6,635,498
Granted Patent Utility
US 6,635,498 · Confirmation No. 6595

METHOD OF PATTERNING A FERAM CAPACITOR WITH A SIDEWALL DURING BOTTOM ELECTRODE ETCH

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 Code Description Pages PDF
2002-08-16 TRNA Transmittal of New Application 2 View
2002-08-16 SPEC Specification 39 View
2002-08-16 CLM Claims 7 View
2002-08-16 ABST Abstract 1 View
2002-08-16 DRW Drawings-only black and white line drawings 10 View
2002-08-16 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,635,498
App. No.
10/222,718
Filed
2002-08-16
Granted
2003-10-21
Pub. No.
US20030119211A1
Art Unit
2824
PTA
0 days