IP Library › Granted Patent US 6,821,397
Granted Patent Utility
US 6,821,397 · Confirmation No. 4783

METHOD FOR CONTROLLING PLASMA DENSITY OR THE DISTRIBUTION THEREOF

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2003-10-09 CTNF Non-Final Rejection 14 View
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2002-08-22 FWCLM Index of Claims 1 View
2002-08-22 TRNA Transmittal of New Application 2 View
2002-08-22 DRW Drawings-only black and white line drawings 12 View
2002-08-22 SPEC Specification 28 View
2002-08-22 CLM Claims 8 View
2002-08-22 ABST Abstract 1 View
2002-08-22 OATH Oath or Declaration filed 2 View
2002-08-22 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
Patent No.
US 6,821,397
App. No.
10/225,717
Filed
2002-08-22
Granted
2004-11-23
Pub. No.
US20030042130A1
Art Unit
1753
PTA
-35 days