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App. No. 10/225,974 · Confirmation No. 5085

IN SITU PLASMA PRE-DEPOSITION WAFER TREATMENT IN CHEMICAL VAPOR DEPOSITION TECHNOLOGY FOR SEMICONDUCTOR INTEGRATED CIRCUIT APPLICATIONS AND STRUCTURES FABRICATED USING THE TREATMENT

Inventor: Weimin Li
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2015-06-10 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2015-06-10 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2015-06-08 PA.. Power of Attorney 1 View
2015-06-08 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2015-06-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2004-09-14 CTMS Miscellaneous Action with shortened statutory period (SSP) 3 View
2004-08-03 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-08-03 A.NA Amendment after Notice of Allowance (Rule 312) 3 View
2004-08-03 SPEC Specification 10 View
2004-08-03 ABST Abstract 1 View
2004-08-03 CLM Claims 3 View
2004-08-03 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-08-03 LET. Miscellaneous Incoming Letter 2 View
2004-08-03 DRW Drawings-only black and white line drawings 1 View
2004-05-13 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-13 NOA Notice of Allowance and Fees Due (PTOL-85) 1 View
2004-05-13 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-05-13 FWCLM Index of Claims 1 View
2004-05-13 SRFW Search information including classification, databases and other search related notes 1 View
2004-05-11 SRNT Examiner's search strategy and results 3 View
2004-04-07 CLM Claims 2 View
2004-04-07 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2004-04-07 RCEX Request for Continued Examination (RCE) 1 View
2004-04-07 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-03-31 CTAV Advisory Action (PTOL-303) 3 View
2004-03-27 WFEE Fee Worksheet (SB06) 1 View
2004-03-27 FWCLM Index of Claims 1 View
2004-03-18 A.NE Response After Final Action 2 View
2004-03-18 SPEC Specification 1 View
2004-03-18 CLM Claims 2 View
2004-03-18 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-01-14 CTFR Final Rejection 7 View
2004-01-14 FWCLM Index of Claims 1 View
2003-10-27 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-10-27 CLM Claims 2 View
2003-10-27 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-07-24 CTNF Non-Final Rejection 6 View
2003-07-24 892 List of references cited by examiner 1 View
2003-07-24 1449 List of References cited by applicant and considered by examiner 2 View
2002-11-25 A.PE Preliminary Amendment 1 View
2002-11-25 SPEC Specification 1 View
2002-11-25 CLM Claims 3 View
2002-11-25 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2002-09-16 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2002-09-16 FOR Foreign Reference 6 View
2002-08-22 TRNA Transmittal of New Application 2 View
2002-08-22 SPEC Specification 15 View
2002-08-22 CLM Claims 3 View
2002-08-22 ABST Abstract 1 View
2002-08-22 DRW Drawings-only black and white line drawings 7 View
2002-08-22 OATH Oath or Declaration filed 1 View
2002-08-22 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-08-22 SRFW Search information including classification, databases and other search related notes 1 View
2002-08-22 FWCLM Index of Claims 1 View
2002-08-22 TRNA Transmittal of New Application 2 View
2002-08-22 DRW Drawings-only black and white line drawings 7 View
2002-08-22 SPEC Specification 15 View
2002-08-22 CLM Claims 3 View
2002-08-22 ABST Abstract 1 View
2002-08-22 OATH Oath or Declaration filed 1 View
2002-08-22 WFEE Fee Worksheet (SB06) 1 View
2002-08-22 WFEE Fee Worksheet (SB06) 1 View
2002-08-22 WCLM Claims Worksheet (PTO-2022) 1 View
2002-08-22 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
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Quick Facts
App. No.
10/225,974
Filed
2002-08-22
Granted
2004-11-09
Pub. No.
US20030001263A1
Examiner
VU, HUNG K
Art Unit
2811
PTA
-102 days