Method of sampling contaminants of semiconductor wafer carrier

1. A method of sampling contaminants of a semiconductor wafer carrier comprising:

placing a tool chamber in a clean room;

placing and fixing a semiconductor wafer carrier with its opening facing downward inside the tool chamber;

using at least one nozzle to spray extraction fluid uniformly on the inner surfaces of the semiconductor wafer carrier, wherein the extraction fluid comprises deionized water and carrier gas; and

collecting the extraction fluid.

2. The method of sampling contaminants of claim 1 , wherein the clean room comprises a chemical composition filter and a particle filter.

3. The method of sampling contaminants of claim 2 , wherein the chemical composition filter is used for filtering oxynitride and oxysulfide.

4. The method of sampling contaminants of claim 1 , wherein a stopper is positioned on the inner edge of an opening of the tool chamber and is used for preventing the air within the clean room from flowing into the tool chamber.

5. The method of sampling contaminants of claim 1 , wherein the nozzle is a loop type nozzle.

6. The method of sampling contaminants of claim 1 further comprising controlling the quantity of deionized water and carrier gas so as to form a column of the extraction fluid or a mist of the extraction fluid.

7. The method of sampling contaminants of claim 1 further comprising controlling temperature of the extraction fluid so as to improve sampling efficiency.

8. The method of sampling contaminants of claim 1 , wherein the semiconductor wafer carrier comprises a front opening unified pod (FOUP) and a SMIF pod.

9. The method of sampling contaminants of claim 1 further comprising cleaning and drying the tool chamber before sampling contaminants of the semiconductor wafer carrier.

10. The method of sampling contaminants of claim 9 further comprising using the nozzle to spray deionized water and hydrogen peroxide solution uniformly inside the tool chamber for cleaning the tool chamber.

11. The method of sampling contaminants of claim 9 further comprising using the nozzle to spray dry gas uniformly inside the tool chamber for drying the tool chamber.

12. A method of sampling contaminants of a semiconductor wafer carrier comprising:

placing a tool chamber in a clean room;

cleaning the tool chamber by using at least one nozzle to spray deionized water and hydrogen peroxide solution uniformly inside the tool chamber;

drying the tool chamber;

placing and fixing a semiconductor wafer carrier with its opening facing downward inside the tool chamber;

using the nozzle to spray extraction fluid uniformly on the inner surfaces of the semiconductor wafer carrier; and

collecting the extraction fluid.

13. The method of sampling contaminants of claim 12 , wherein the clean room comprises a chemical composition filter and a particle filter.

14. The method of sampling contaminants of claim 13 , wherein the chemical composition filter is used for filtering oxynitride and oxysulfide.

15. The method of sampling contaminants of claim 12 , wherein a stopper is positioned on the inner edge of an opening of the tool chamber and is used for preventing the air within the clean room from flowing into the tool chamber.

16. The method of sampling contaminants of claim 12 , wherein the nozzle is a loop type nozzle.

17. The method of sampling contaminants of claim 12 , further comprising controlling temperature of the extraction fluid so as to improve sampling efficiency.

18. The method of sampling contaminants of claim 12 , wherein the semiconductor wafer carrier comprises a front opening unified pod (FOUP) and a SMIF pod.

19. The method of sampling contaminants of claim 12 further comprising using the nozzle to spray dry gas uniformly inside the tool chamber for drying the tool chamber.