Modular substrate measurement system
View Patent ↗A substrate measurement system including a measurement chamber and a substrate handling chamber possessing a substrate transfer and a substrate container interface arranged to receive a substrate to container. The handling chamber contains a first interface to connect the measurement chamber and the measurement chamber contains a second interface to connect the handling chamber. The transfer means is arranged to transfer substrates between the container and the measurement chamber through the handling chamber, in which system a second measurement chamber is provided, having the same second interface as the first measurement chamber to replace latter chamber.
1. An assembly of a substrate measurement system comprising a first measurement chamber, and a substrate handling chamber provided with a substrate transfer and at least one substrate container interface for receiving a substrate container, said substrate handling chamber being provided with a first mechanical interface to connect to the first measurement chamber, said first measurement chamber comprising a measurement instrument and being provided with a second mechanical interface to connect to said substrate handling chamber, and said substrate transfer being arranged to transfer substrates between said substrate container and said first measurement chamber through said substrate handling chamber, characterised in that a second measurement chamber is provided, which fits within the same dimensions as said first measurement chamber and is provided with the same identical second mechanical interface as said first measurement chamber to replace said first measurement chamber, and wherein said substrate container interfaces, and said first mechanical interface of the substrate handling chamber are identical so that each of said interfaces can connect at choice either to the interface of a substrate container or to the second mechanical interface of a measurement chamber.
2. The assembly of a substrate measurement system in accordance with claim 1 , wherein said first mechanical interface comprises a first coupling part and a first mechanical support area and said second mechanical interface comprises a second coupling part and a second mechanical support area; said second coupling part being arranged to match said first coupling part and said second mechanical support area being arranged to match said first mechanical support area.
3. The assembly of a substrate measurement system in accordance with claim. 1 , wherein said second measurement chamber is one of a set of measurement chambers.
4. The assembly of a substrate measurement system in accordance with claim 1 , wherein said substrate handling chamber comprises two first mechanical interfaces to connect two of said first measurement chambers.
5. The assembly of a substrate measurement system in accordance with claim 1 , wherein said assembly comprises at least two substrate container interfaces.
6. The assembly of a substrate measurement system in accordance with claim 5 , wherein said substrate container interfaces and said first mechanical interface are FOUP interfaces.
7. The assembly of a substrate measurement system in accordance with claim 5 , wherein at least one of said substrate container interfaces receives said substrate container from a substrate container storage system by a transfer means.
8. The assembly of a substrate measurement system in accordance with claim 1 in which any of said measurement chambers, said substrate containers and said substrate handling chamber is arranged to be gastight sealable.
9. The assembly of a substrate measurement system in accordance with claim 1 , wherein said substrate container comprises a closed housing with a removable door and, to connect to said substrate container interface, a mechanical interface which sealably engages with said housing, and said substrate container interface comprises a mechanism arranged to engage with and remove/relocate said removable door.
10. The assembly of a substrate measurement system in accordance with claim 1 , wherein said first and second measurement chambers are capable of receiving a substrate, with said substrate being transferred in or out the measurement chamber by said substrate transfer and said measurement chambers being provided with a substrate support arranged to support said substrate, a rotator arranged to rotate said substrate support, in order to facilitate substrate mapping measurement, a sensor transfer to displace a sensor of said measurement instrument relative to said substrate.
11. The assembly of a substrate measurement system in accordance with claim 1 , wherein said first and second measurement chambers are capable of receiving a substrate, with said substrate being transferred in or out of the measurement chambers by said substrate transfer and said measurement chambers being provided with a substrate support arranged to support said substrate, a rotator arranged to rotate said substrate support in order to facilitate substrate mapping measurements, and a sensor transfer to displace the substrate support of the measurement instrument relative to the sensor of the measurement instrument.