Patent Assignment
Reel/Frame 031935/0815
Change of Name
Recorded: 2014-01-07
Pages: 3
Assignor
NANOPHOTONICS AG
Executed: 2010-04-21
Assignee
NANOPHOTONICS GMBH
GALILEO-GALILEI-STRASSE 28, MAINZ, 55129, GERMANY
Covered Properties
(2)
Modular Substrate Measurement System
Patent:
6,420,864 →
Application:
09/548,773 →
Modular Substrate Measurement System
Related Assignments
(2)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Jan 10, 2014
From: NANOPHOTONICS GMBH (ALSO KNOWN AS ZEGEMA GMBH)
To: VINOTAL GMBH (NOW KNOWN AS RUDOLPH TECHNOLOGIES GERMANY GMBH)
Reel/Frame 031939/0707 →
Assignment of Assignor's Interest
Jun 30, 2020
From: RUDOLPH TECHNOLOGIES GERMANY GMBH
To: ONTO INNOVATION INC.
Reel/Frame 053084/0849 →