Polymers for photoresist compositions for microlithography
View Patent ↗Nitrile/vinyl ether-containing polymers for photoresist compositions and microlithography methods employing the photoresist compositions are described. These photoresist compositions comprise 1) at least one ethylenically unsaturated compound comprised of a vinyl ether and 2) a nitrile-containing compound, e.g., acrylonitrile, which together impart high ultraviolet (UV) transparency and developability in basic media. In some embodiments, these photoresist compositions further comprise a fluoroalcohol group. The photoresist compositions of this invention have, high UV transparency, particularly at short wavelengths, e.g., 157 nm and 193 nm, which property makes them useful for lithography at these short wavelengths.
1. A photoresist composition comprising:
(a) a polymer comprising:
(i) a first repeat unit derived from at least one ethylenically unsaturated compound comprising a vinyl ether and having the structure:
C(R 1 )(R 2 )═C(R 3 )O—R
where R 1 , R 2 , and R 3 independently area hydrogen atom or an alkyl group ranging from 1 to 3 carbon atoms;
R is a substituted or unsubstituted hydrocarbon group containing from 1 to 20 carbon atoms, when R is a substituted hydrocarbon group it contains at least one fluorine, chlorine, bromine or oxygen atom;
(ii) a second repeat unit derived from at least one ethylenically unsaturated compound having the structure:
(H)(R 4 )C═C(R 5 )(CN)
wherein R 4 is a hydrogen atom or a cyano group; R 5 is a hydrogen atom, an alkyl group ranging from 1 to 8 carbon atoms, or a CO 2 R 6 group, wherein R 6 is a hydrogen atom or an alkyl group ranging from 1 to 8 carbon atoms; and
(iii) an acidic group, wherein the acidic group is a fluoroalcohol, comprising the structure:
—C(R f )(R f ′)OH
wherein R f and R f ′ are the same or different fluoroalkyl groups containing from 1 to 10 carbon atoms or taken together are (CF 2 ) n wherein n is an integer ranging from 2 to 10, wherein the fluoroalcohol is optionally protected, and
at least one photoactive component.
2. The photoresist composition of claim 1 in which the first repeat unit is derived from 2-hydroxyethylvinyl ether; methylvinylether; ethylvinylether; propylvinylether; 2-ethyihexylvinylether; isopropylvinylether; CH 2 ═CO(CH 2 ) 2 (CF 3 ) m CF 3 , wherein m ranges from 0-12; phenylvinylether; benzylvinylether; p-tolylvinyl ether; or 1-adamantylvinyl ether.
3. The photoresist composition of claim 2 in which the second repeat unit is derived from acrylonitrile, methacrylonitrile, fumaronitrile, or maleonitrile.
4. The photoresist composition of claim 1 in which the first repeat unit comprises the protected acidic group, the first repeat unit being
(a) a reaction product of 1,1-bis(trifluoromethyl)ethylene oxide and (i) 2-hydroxyethylvinyl ether or (ii) 4-hydroxybutylvinyl ether, which reaction product is subsequently reacted with either (i) chioromethylmethyl ether or (ii) t-butyloxycarbonyl or
(b) a t-alkyl substituted acrylate or t-alkyl substituted methacrylate in which the alkyl group contains from 1 to about 10 carbon atoms.
5. The photoresist composition of claim 3 wherein the first repeat unit or the second repeat unit or both comprise the acidic group or the protected acidic group.
6. The photoresist composition of claim 1 wherein the first repeat unit comprises the acidic group which acidic group is a fluoroalcohol having the structure:
CH 2 ═CH—O-A-C(R f )(R f ′)OH
wherein A is an unsubstituted or substituted alkylene group containing from 1 to 12 carbon atoms which is a branched chain or a linear chain; a substituted or unsubstituted alicyclic group containing from 3 to 10 carbon atoms, when A is a substituted alkylene group or alicyclic group, A contains a heteroatom selected from the group consisting of oxygen, sulfur, fluorine and nitrogen; R f and R f ′ are the same or different fluoroalkyl groups containing from 1 to 10 carbon atoms or taken together are (CF 2 ) n wherein n an integer ranging from 2 to 10.
7. The photoresist composition of claim 1 wherein the fluoroalcohol is protected.