Granted Patent
Utility
US 6,744,018
· Confirmation No. 7009
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Inventor:
Satoshi Takano
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2019-07-15 | TRIAL.TRMFWD |
Trial Termination or Final Written Decision | 3 | View | |
| 2018-02-07 | SOL.NTC.SUIT |
Report on the filing or determination of an action regarding a patent | 1 | View | |
| 2004-03-12 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2002-09-30 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-09-30 | ADS |
Application Data Sheet | 2 | View | |
| 2002-09-30 | A.PE |
Preliminary Amendment | 3 | View | |
| 2002-09-30 | SPEC |
Specification | 48 | View | |
| 2002-09-30 | CLM |
Claims | 6 | View | |
| 2002-09-30 | ABST |
Abstract | 1 | View | |
| 2002-09-30 | DRW |
Drawings-only black and white line drawings | 8 | View |
Inventors
Satoshi Takano
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
219/390
H10P72/0602
H10P72/0431
Prosecution
- Examiner
- FUQUA, SHAWNTINA T
- Art Unit
- 3742
- Customer No.
- 25944
- Docket No.
- 113865
- Confirmation No.
- 7009
Foreign Priority
2002-089028
·
2002-03-27
·
JAPAN
Publication
- Pub. No.
- US20030183613A1
- Pub. Date
- 2003-10-02
Patent Term Adjustment
-72days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2018-10-05
from
TAKANO, SATOSHI
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-01-03
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Quick Facts
- Patent No.
- US 6,744,018
- App. No.
- 10/259,762
- Filed
- 2002-09-30
- Granted
- 2004-06-01
- Pub. No.
- US20030183613A1
- Examiner
- FUQUA, SHAWNTINA T
- Art Unit
- 3742
- PTA
- -72 days
External Links