IP Library › Granted Patent US 6,696,367
Granted Patent Utility
US 6,696,367 · Confirmation No. 7744

SYSTEM FOR THE IMPROVED HANDLING OF WAFERS WITHIN A PROCESS TOOL

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2007-06-11 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
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2003-09-15 IDS Information Disclosure Statement (IDS) Form (SB08) 9 View
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2002-09-27 SPEC Specification 16 View
2002-09-27 CLM Claims 5 View
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2002-09-27 OATH Oath or Declaration filed 4 View
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Quick Facts
Patent No.
US 6,696,367
App. No.
10/260,821
Filed
2002-09-27
Granted
2004-02-24
Art Unit
2812
PTA
0 days