Multiple beam micromachining system for removing at least two different layers of a substrate
View Patent ↗A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.
1. A method for micro-machining a substrate, comprising:
providing a UV laser beam to a beam splitter device;
splitting said UV laser beam into a first number of output beams and directing said first number of output beams to form at least one opening in a first layer of a multi-layered substrate; and then
splitting said UV laser beam into a second number of output beams and directing ones of said second number of output beams to remove selected portions of a second layer of said multi-layered substrate via said at least one opening.
2. The method claimed in claim 1 and wherein said providing comprises generating said laser beam using a Q-switched laser.
3. The method claimed in claim 1 and wherein said splitting said UV laser beam into a first number of output beams comprises:
splitting said UV laser beam into a selectable first number of output beams.
4. The method claimed in claim 1 and wherein said splitting said UV laser beam into a second number of output beams comprises:
splitting said UV laser beam into a selectable second number of output beams.
5. The method claimed in claim 1 and wherein said directing said first number of output beams comprises:
directing each of said first number of output beams in a selectable direction.
6. The method claimed in claim 1 and wherein said directing ones of said second number of output beams comprises:
directing ones of said second number of output beams in a selectable direction.
7. The method claimed in claim 3 and wherein said directing said first number of output beams comprises:
directing each of said first number of output beams in a selectable direction.
8. The method claimed in claim 4 and wherein said directing ones of said second number of output beams comprises:
directing ones of said second number of output beams in a selectable direction.
9. The method claimed in claim 7 and also comprising:
providing an acousto-optical deflector; and
controlling said acousto-optical deflector.
10. The method claimed in claim 9 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable first number of output beams.
11. The method claimed in claim 9 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable directions of said first number of output beams.
12. The method claimed in claim 10 and wherein said controlling also comprises:
determining said selectable directions of said first number of output beams.
13. The method claimed in claim 12 and wherein said generating an acoustic wave comprises:
generating a plurality of spatially distinct acoustic wave segments; and
defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.
14. The method claimed in claim 13 and also comprising:
determining a corresponding spatially distinct direction of a corresponding output beam from said each spatially distinct acoustic wave segment,
said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
15. The method claimed in claim 13 and also comprising:
determining the number of corresponding output beams from the number of said spatially distinct acoustic wave segments.
16. The method claimed in claim 1 and wherein:
said first number of output beams comprises a selectable number of output beams;
said second number of output beams comprises a selectable number of output beams;
and the method also comprises:
changing at least one of the number and direction of said output beams within a reconfiguration time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.
17. The method claimed in claim 1 and also comprising:
changing the direction of said first number of output beams within a redirection time duration;
changing the direction of said second number of output beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
18. The method claimed in claim 16 and also comprising:
changing the direction of said first number of output beams within a redirection time duration;
changing the direction of said second number of output beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
19. The method claimed in claim 1 and also comprising:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
20. The method claimed in claim 18 and also comprising:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
21. The method claimed in claim 19 and wherein said at least one actuator comprises a piezoelectric device.
22. The method claimed in claim 19 and wherein said at least one actuator comprises a MEMs device.
23. The method claimed in claim 3 and wherein said selectable number of first output beams all lie in a plane.
24. The method claimed in claim 4 and wherein said selectable number of second output beams all lie in a plane.
25. The method claimed in claim 1 and wherein said first number of output beams has a first energy density and wherein output beams of said second number of output beams have a second energy density that is different from said first energy density.