IP Library Granted Patent US 6,685,774
Granted Patent Utility
US 6,685,774 · Confirmation No. 3527

SUSCEPTORLESS REACTOR FOR GROWING EPITAXIAL LAYERS ON WAFERS BY CHEMICAL VAPOR DEPOSITION

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Code Description Pages PDF
2003-10-22 IFEE Issue Fee Payment (PTO-85B) 2 View
2002-10-10 TRNA Transmittal of New Application 2 View
2002-10-10 ADS Application Data Sheet 3 View
2002-10-10 SPEC Specification 24 View
2002-10-10 CLM Claims 2 View
2002-10-10 ABST Abstract 1 View
2002-10-10 DRW Drawings-only black and white line drawings 9 View
2002-10-10 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,685,774
App. No.
10/268,464
Filed
2002-10-10
Granted
2004-02-03
Pub. No.
US20030047132A1
Art Unit
1765
PTA
0 days