Three dimensional device integration method and integrated device
View Patent ↗A device integration method and integrated device. The method may include the steps of directly bonding a semiconductor device having a substrate to an element; and removing a portion of the substrate to expose a remaining portion of the semiconductor device after bonding. The element may include one of a substrate used for thermal spreading, impedance matching or for RF isolation, an antenna, and a matching network comprised of passive elements. A second thermal spreading substrate may be bonded to the remaining portion of the semiconductor device. Interconnections may be made through the first or second substrates. The method may also include bonding a plurality of semiconductor devices to an element, and the element may have recesses in which the semiconductor devices are disposed. A conductor array having a plurality of contact structures may be formed on an exposed surface of the semiconductor device, vias may be formed through the semiconductor device to device regions, and interconnection may be formed between said device regions and said contact structures.
1. An integration method, comprising:
forming a first layer of bondable material on a first semiconductor device having a first substrate;
forming a second layer of bondable material on a first element having a second substrate;
polishing each of said first and second layers of bondable materials after said forming steps;
bringing into direct contact said first layer of bondable material with said second layer of bondable material after said polishing;
directly bonding without fusing said first layer of bondable material to said second layer of bondable material; and
removing a portion of said first substrate to leave a remaining portion of said first semiconductor device after said bonding.
2. A method as recited in claim 1 , comprising:
polishing each of said first and second layers of bondable material after said forming steps each to a substantially planar surface with a surface roughness in the range of 5-10 Angstroms.
3. A method as recited in claim 1 , comprising:
polishing each of said first and second layers of bondable materials after said forming steps each to a substantially planar surface with a surface roughness no more than 5 Angstroms.
4. A method as recited in claim 1 , comprising:
forming said first and second layers of bondable material each of a material having a thermal conductivity in a range of 1-10 W/cmK and a dielectric constant in a range of 1-3.
5. A method as recited in claim 1 , comprising:
forming said first and second layers of bondable material each of silicon dioxide.
6. A method as recited in claim 1 , comprising:
polishing each of said first and second layers of bondable materials to a surface roughness in a range of 5-15 Angstroms.
7. A method as recited in claim 1 , comprising:
forming a third layer of bondable material on said remaining portion;
polishing said third layer of bondable material;
forming a fourth layer of bondable material on a second semiconductor device, said second semiconductor device having a third substrate and a contact structure;
polishing said fourth bondable material;
bringing into direct contact said third and fourth layers of bondable material after polishing said third and fourth layers of bondable material;
directly bonding without fusing said third and fourth layers of bondable material;
removing a portion of said third substrate after bonding third and fourth bondable materials; and
interconnecting said contact structure to a contact structure in one of said first semiconductor device and said first element.
8. A method as recited in claim 7 , wherein:
removing a portion of said first substrate comprises one of grinding and polishing said first substrate; and
removing a portion of said third substrate comprises one of grinding and polishing.
9. A method as recited in claim 7 , comprising:
polishing each of said third and fourth layers of bondable material to a surface roughness in a range of 5-15 Angstroms.
10. A method as recited in claim 7 , comprising:
polishing each of said third and fourth layers of bondable materials after said forming steps to a substantially planar surface with a surface roughness no more than 5 Angstroms.
11. A method as recited in claim 7 , comprising:
polishing each of said first and second layers of bondable materials to a substantially planar surface with a surface roughness no more than 15 Angstroms.
12. A method as recited in claim 7 , wherein said first element comprises a semiconductor device.
13. A method as recited in claim 1 , wherein said first semiconductor device has a first contact structure and said first element has a second contact structure, said method further comprising interconnecting said first and second contact structures.
14. A method as recited in claim 1 , wherein said removing step comprises thinning said first substrate.
15. A method as recited in claim 1 , wherein said removing step comprises one of grinding and polishing.
16. A method as recited in claim 15 , comprising:
bonding said first and second layers of bondable materials without application of temperature.
17. A method as recited in claim 1 , comprising:
bonding said first and second layers of bondable materials without application of temperature.
18. A method as recited in claim 1 , wherein said first substrate has a width smaller than that of said second substrate.
19. A method as recited in claim 1 , comprising:
forming a first aperture in said remaining portion; and
forming a first contact structure in said aperture.
20. A method as recited in claim 19 , comprising:
exposing a second contact structure in said first semiconductor device; and
connecting said first contact structure to said second contact structure.
21. A method as recited in claim 19 , comprising:
exposing a second contact structure in said first semiconductor device; and
forming said first contact structure on said second contact structure.
22. A method as recited in claim 19 , wherein:
forming said first aperture comprises exposing a second contact structure in said first semiconductor device; and
forming said first contact structure in contact with said second contact structure.
23. A method as recited in claim 19 , comprising:
exposing a second contact structure in said first semiconductor device;
exposing a third contact structure in said first element; and
connecting said second and third contact structures using said first contact structure.
24. A method as recited in claim 23 , comprising:
forming a second aperture in said first element; and
forming said first contact structure in said second aperture.
25. A method as recited in claim 24 , wherein:
forming said first aperture comprises exposing said second contact structure in said first semiconductor device;
forming said second aperture comprises exposing said third contact structure in said first element; and
forming said first contact structure comprises connecting said second contact structure to said third contact structure.
26. A method as recited in claim 19 , comprising:
forming a second aperture in said first element; and
forming said first contact structure in said second aperture.
27. A method as recited in claim 19 , comprising: said aperture having a sidewall comprising an insulating material; and
said first contact structure formed on said sidewall.
28. A method as recited claim 19 , comprising:
forming an insulating material between said contact and said remaining portion.
29. A method as recited in claim 1 , comprising:
forming said first layer of bondable material on a top side of said first semiconductor device; and
forming said second layer of bondable material on a top side of said first element.
30. A method as recited in claim 29 , comprising:
forming a first aperture in said remaining portion; and
forming a first contact structure in said aperture.
31. A method as recited in claim 30 , comprising:
exposing a second contact structure in said first semiconductor device; and
connecting said first contact structure to said second contact structure.
32. Method as recited in claim 30 , comprising:
exposing a second contact structure in said first semiconductor device; and
forming said first contact structure on said second contact structure.
33. A method as recited in claim 30 , wherein:
forming said first aperture comprises exposing a second contact structure in said first semiconductor device; and
forming said first contact structure in contact with said second contact structure.
34. A method as recited in claim 30 , comprising:
exposing a second contact structure in said first semiconductor device;
exposing a third contact structure in said first element; and
connecting said second and third contact structures using said first contact structure.
35. A method as recited in claim 34 , comprising:
forming a second aperture in said first element; and
forming said first contact structure in said second aperture.
36. A method as recited in claim 35 , wherein:
forming said first aperture comprises exposing said second contact structure in said first semiconductor device;
forming said second aperture comprises exposing said third contact structure in said first element; and
forming said first contact structure comprises connecting said second contact structure to said third contact structure.
37. A method as recited in claim 30 , comprising:
forming a second aperture in said first element; and
forming said first contact structure in said second aperture.
38. A method as recited in claim 1 , comprising:
said first semiconductor device having a top side and a bottom side;
said first element having a top side and a bottom side;
bonding said top side of first semiconductor device to said top side of said first element; and
forming a contact to said first semiconductor device from said back side of said first device.
39. A method as recited in claim 38 , comprising:
forming said contact through at least a portion of said remaining portion.
40. A method as recited in claim 38 , comprising:
forming a contact between said first semiconductor device and said first element from said back side of said first semiconductor device.
41. A method as recited in claim 40 , comprising:
forming said contact through at least a portion of said remaining portion.
42. A method as recited in claim 1 , comprising:
forming at least one of said first and second layers of bondable material as silicon oxide.
43. A method as recited in claim 1 , comprising:
forming at least one of said first and second layers of bondable material comprises depositing a silicon oxide material.
44. A method as recited in claim 1 , comprising:
forming at least one of said first and second layers of bondable material comprises depositing a silicon-based material.
45. A method as recited in claim 1 , wherein said first element comprises a semiconductor device.
46. A method as recited in claim 1 , comprising:
forming an insulating material on said remaining portion;
forming an aperture in said remaining portion and said insulating material;
forming a contact structure in said aperture.
47. A method as recited in claim 1 , comprising:
said remaining portion comprising a semiconductor material.
48. A method as recited in claim 1 , comprising:
forming said remaining portion to have an exposed region;
forming an insulating material on said exposed region; and
forming a contact structure on said insulating layer.
49. A method as recited in claim 48 , comprising:
forming said contact structure in connection with at least one of a first contact structure in said first device and a second contact structure in said first element.
50. A method as recited in claim 1 , comprising:
forming said first and second layers of bondable material each of silicon oxide.