IP Library › Granted Patent US 6,776,696
Granted Patent Utility
US 6,776,696 · Confirmation No. 4151

CONTINUOUS CHEMICAL MECHANICAL POLISHING PROCESS FOR POLISHING MULTIPLE CONDUCTIVE AND NON-CONDUCTIVE LAYERS ON SEMICONDUCTOR WAFERS

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2022-09-22 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2004-06-10 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-04-21 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-04-21 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-04-21 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-04-21 SRFW Search information including classification, databases and other search related notes 1 View
2004-03-12 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-03-12 CLM Claims 11 View
2004-03-12 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-03-12 LET. Miscellaneous Incoming Letter 2 View
2003-12-19 CTNF Non-Final Rejection 6 View
2003-12-19 892 List of references cited by examiner 1 View
2003-09-24 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-09-24 CLM Claims 6 View
2003-09-24 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2003-09-24 LET. Miscellaneous Incoming Letter 2 View
2003-06-20 CTNF Non-Final Rejection 6 View
2003-06-20 892 List of references cited by examiner 1 View
2003-06-20 1449 List of References cited by applicant and considered by examiner 2 View
2002-12-18 OATH Oath or Declaration filed 3 View
2002-12-18 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-12-18 LET. Miscellaneous Incoming Letter 4 View
2002-11-25 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2002-10-28 TRNA Transmittal of New Application 2 View
2002-10-28 SPEC Specification 17 View
2002-10-28 CLM Claims 6 View
2002-10-28 ABST Abstract 1 View
2002-10-28 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-10-28 SRFW Search information including classification, databases and other search related notes 1 View
2002-10-28 FWCLM Index of Claims 1 View
2002-10-28 TRNA Transmittal of New Application 2 View
2002-10-28 SPEC Specification 17 View
2002-10-28 CLM Claims 6 View
2002-10-28 ABST Abstract 1 View
2002-10-28 WFEE Fee Worksheet (SB06) 1 View
2002-10-28 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
Patent No.
US 6,776,696
App. No.
10/281,905
Filed
2002-10-28
Granted
2004-08-17
Pub. No.
US20040082275A1
Art Unit
3723
PTA
-4 days