IP Library › Granted Patent US 6,713,342
Granted Patent Utility
US 6,713,342 · Confirmation No. 7078

FERAM SIDEWALL DIFFUSION BARRIER ETCH

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2003-11-24 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-09-05 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-09-05 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-09-05 892 List of references cited by examiner 1 View
2003-09-05 1449 List of References cited by applicant and considered by examiner 1 View
2003-09-05 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-09-05 FWCLM Index of Claims 1 View
2003-09-05 SRFW Search information including classification, databases and other search related notes 1 View
2003-09-05 SRNT Examiner's search strategy and results 1 View
2002-10-29 TRNA Transmittal of New Application 2 View
2002-10-29 SPEC Specification 60 View
2002-10-29 CLM Claims 6 View
2002-10-29 ABST Abstract 1 View
2002-10-29 DRW Drawings-only black and white line drawings 15 View
2002-10-29 OATH Oath or Declaration filed 3 View
2002-10-29 TRNA Transmittal of New Application 2 View
2002-10-29 SPEC Specification 60 View
2002-10-29 CLM Claims 6 View
2002-10-29 ABST Abstract 1 View
2002-10-29 DRW Drawings-only black and white line drawings 15 View
2002-10-29 OATH Oath or Declaration filed 3 View
2002-10-29 WFEE Fee Worksheet (SB06) 1 View
2002-10-29 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
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Quick Facts
Patent No.
US 6,713,342
App. No.
10/282,759
Filed
2002-10-29
Granted
2004-03-30
Pub. No.
US20030129847A1
Examiner
LE, THAO P
Art Unit
2818
PTA
0 days