Granted Patent
Utility
US 6,642,149
· Confirmation No. 5800
PLASMA PROCESSING METHOD
Inventors:
Tomoki Suemasa, Tsuyoshi Ono, Kouichiro Inazawa, Makoto Sekine, Itsuko Sakai, Yukimasa Yoshida
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2017-09-28 | OATH |
Oath or Declaration filed | 4 | View | |
| 2003-09-08 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2002-11-04 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-11-04 | ADS |
Application Data Sheet | 3 | View | |
| 2002-11-04 | A.PE |
Preliminary Amendment | 7 | View | |
| 2002-11-04 | SPEC |
Specification | 19 | View | |
| 2002-11-04 | CLM |
Claims | 3 | View | |
| 2002-11-04 | ABST |
Abstract | 1 | View | |
| 2002-11-04 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2002-11-04 | OATH |
Oath or Declaration filed | 7 | View | |
| 2002-11-04 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
Tomoki Suemasa
Nakakoma-gun, JAPAN
Tsuyoshi Ono
Chofu-shi, JAPAN
Kouichiro Inazawa
Tokyo, JAPAN
Makoto Sekine
Yokohama-shi, JAPAN
Itsuko Sakai
Yokohama-shi, JAPAN
Yukimasa Yoshida
Yokohama-shi, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/712
H01J37/32174
H01J37/32091
H01J37/32165
Prosecution
- Examiner
- DEO, DUY VU NGUYEN
- Art Unit
- 1765
- Customer No.
- 22850
- Docket No.
- 230301US2SX CONT
- Confirmation No.
- 5800
Foreign Priority
10-280587
·
1998-09-16
·
JAPAN
Publication
- Pub. No.
- US20030054647A1
- Pub. Date
- 2003-03-20
Patent Term Adjustment
-2days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2017-09-28
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Quick Facts
- Patent No.
- US 6,642,149
- App. No.
- 10/286,789
- Filed
- 2002-11-04
- Granted
- 2003-11-04
- Pub. No.
- US20030054647A1
- Examiner
- DEO, DUY VU NGUYEN
- Art Unit
- 1765
- PTA
- -2 days
External Links